PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • In the embodiments illustrated in FIGS. 6-15, a single positive photo resist layer may be utilized, however, it is contemplated that any number and types of layers may be utilized to provide a desired image for etching into the semiconductor substrate.
http://www.w3.org/ns/prov#wasQuotedFrom
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