About: http://webisa.webdatacommons.org/38364043

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate is put in an ambient atmosphere containing hydrogen chloride diluted by oxygen by 10% and visible or near infrared radiation of which wavelength is mainly from 0.8 to 1.4 ??m is irradiated on the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es