| http://www.w3.org/ns/prov#value | - 20130052790DOPING APPROACH OF TITANIUM DIOXIDE FOR DRAM CAPACITORS - A method for fabricating a DRAM capacitor stack is described wherein the dielectric material is a doped material formed from a first dopant in concert with a second dopant wherein the second dopant has a different physical size from the first dopant and the presence of the second dopant influences the solubility of the first dopa
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