About: http://webisa.webdatacommons.org/399951631

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7A is a schematic side view of a washing apparatus to clean the polishing pad.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca