| http://www.w3.org/ns/prov#value | - The protruding portion 22 a can be formed by thermal deformation of the rim of the high-resistance metal layer 22 processed by laser by controlling laser conditions at the time of laser-processing, and can be formed so as to have a desired height by, for example, controlling laser conditions such as laser energy, laser pulse frequency, laser pulse width and the number of emissions.
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