About: http://webisa.webdatacommons.org/48025723

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 4 is a drawing to show a case in which the edges along the Y direction of the already written pattern in the photosensitive substrate have a deviation of angle.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com