About: http://webisa.webdatacommons.org/8708661

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method for in situ plasma bonding of wafers for silicon, gallium arsenide, indium phosphide, or other materials where a direct contact without an interface is desired, comprising the steps of:
http://www.w3.org/ns/prov#wasQuotedFrom	google.com