About: http://webisa.webdatacommons.org/125225942

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	If again KOH will be used for that later etching step, which is an advantageous option, silicon nitride is an example of a suitable etch stop material that can be used for etch stop layer 126.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com