| http://www.w3.org/ns/prov#value | - A phase shift mask according to a fifteenth embodiment of the present invention will be explained using FIG. 25A to FIG. 25C, FIG. 26A, and FIG. 26B. FIG. 25A to FIG. 25C are a plan view and cross sectional views showing the phase shift mask according to this embodiment.
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