About: http://webisa.webdatacommons.org/1669122

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	classifying images of defects present on a sample such as a semiconductor
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com