About: http://webisa.webdatacommons.org/317158698

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this case, a reactive carrier gas such as an oxygen-containing carrier gas (air, oxygen or nitrous oxide), or ammonia, silane, hydrogen sulfide, and the like or combination of inert and reactive carrier gases may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com