About: http://webisa.webdatacommons.org/324441334

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment the anisotropic conductivity layer 56 is made up of multiple layers of different types of silicon and a dielectric that are deposited on substrate 10.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com