| http://www.w3.org/ns/prov#value | - Next, to pattern the channel-protecting film 5' in a self-aligning manner with respect to the gate electrode 2, after a resist (not shown) is coated on the channel-protecting film 5', exposure is effected from the reverse surface of the glass substrate 1 whereby the resist in a region other than the portion of the nontranslucent gate electrode 2 was exposed to light and was developed, thereby form
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