About: http://webisa.webdatacommons.org/365624432

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 13A is a schematic diagram that depicts one example of the operation of the exposure apparatus, and FIG. 13B is a schematic diagram that likewise depicts one example of the operation of the exposure apparatus.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr