About: http://webisa.webdatacommons.org/367345073

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIGS. 12, 13 and 14 show other examples of three-dimensionally patterned surface of the substrate support 2, respectively.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com