| http://www.w3.org/ns/prov#value | - 1988Jan 2, 1990Texas Instruments IncorporatedUniform porosity in semiconductorsUS5191218Jun 28, 1991Mar 2, 1993Canon Kabushiki KaishaVacuum-attraction holding deviceUS5324012Jul 6, 1992Jun 28, 1994Nikon CorporationHolding apparatus for holding an article such as a semiconductor waferUS5342495Feb 3, 1993Aug 30, 1994Vlsi Technology, Inc.Structure for holding integrated circuit dies to be electroplat
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