About: http://webisa.webdatacommons.org/40599091

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A computer processor (associated, for example, with the data processing equipment such as in FIG. 2) can diagnose a contaminated cryopump in the implant process by analyzing this data received by the local server.
http://www.w3.org/ns/prov#wasQuotedFrom	google.co.uk