About: http://webisa.webdatacommons.org/422854223

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate 120 may be, for example, a semiconductor wafer having diameters such as 4???, 6???, 8???, 12???, etc., a glass substrate for making a flat panel display, and so on.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com