About: http://webisa.webdatacommons.org/430771933

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	.mu.m, since there is a need of leaving a margin of several .mu.m or more for the purpose of preventing the abrasives for causing damage thereto.
http://www.w3.org/ns/prov#wasQuotedFrom	patents.com