About: http://webisa.webdatacommons.org/52387907

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The electrolyte used in processing the substrate 108 can polish metals such as copper, aluminum, tungsten, gold, silver or other materials that can be electro-chemically deposited onto or electrochemically removed from the substrate 108.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es