About: http://webisa.webdatacommons.org/67009716

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 3A is a side view of the main parts of an embodiment of the electron beam lithography apparatus for executing the electron beam lithography method of the present invention.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com