| http://www.w3.org/ns/prov#value | - Incidentally, FIG. 12A is a sectional view cut along the chain line D-D of FIG. 12B. [0110] Subsequently, in the same process as that of the first embodiment, barrier metal films 13 and Cu films are embedded inside the via-hole 9 and the recesses 10, 57 a, 57 b, 57 c.
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