{ "items" : [
    { "id" : "http://webisa.webdatacommons.org/prov/137300572"
      "properties" : {
        "http://www.w3.org/ns/prov#wasDerivedFrom" : [ "http://webisa.webdatacommons.org/108296741" ] } },

    { "id" : "http://webisa.webdatacommons.org/108296741"
      "properties" : {
        "http://www.w3.org/1999/02/22-rdf-syntax-ns#type" : [ "http://www.w3.org/ns/prov#Entity" ] ,
        "http://www.w3.org/ns/prov#value" : [ "To attain the above object, a first aspect of the present invention is a method for forming a film of a processing solution on a substrate, comprising the steps of rotating the substrate, supplying the processing solution discharged from a nozzle onto the rotating substrate, moving a position on the substrate of the processing solution to be supplied from the nozzle nearly in a radial direction of" ] ,
        "http://www.w3.org/ns/prov#wasQuotedFrom" : [ "google.com"] } } }
