{ "items" : [
    { "id" : "http://webisa.webdatacommons.org/296393010"
      "properties" : {
        "http://www.w3.org/1999/02/22-rdf-syntax-ns#type" : [ "http://www.w3.org/ns/prov#Entity" ] ,
        "http://www.w3.org/ns/prov#value" : [ "More specifically, the present invention describes embodiment of an ALD apparatus for preparing hafnium-containing compounds used in a variety of applications, including high-k dielectric materials." ] ,
        "http://www.w3.org/ns/prov#wasQuotedFrom" : [ "google.com.au" ] } },

    { "id" : "http://webisa.webdatacommons.org/prov/341645215"
      "properties" : {
        "http://www.w3.org/ns/prov#wasDerivedFrom" : [ "http://webisa.webdatacommons.org/296393010"] } } }
