{ "items" : [
    { "id" : "http://webisa.webdatacommons.org/34588156"
      "properties" : {
        "http://www.w3.org/1999/02/22-rdf-syntax-ns#type" : [ "http://www.w3.org/ns/prov#Entity" ] ,
        "http://www.w3.org/ns/prov#value" : [ "The oxidizing agent is useful when incorporated into the first CMP slurry to polish metals and metal based components including titanium, titanium nitride, tantalum, copper, tungsten, aluminum, and aluminum alloys such as aluminum/copper alloys, and various mixtures and combinations thereof by mechanically polishing the metals to remove the respective oxide layer." ] ,
        "http://www.w3.org/ns/prov#wasQuotedFrom" : [ "google.ca" ] } },

    { "id" : "http://webisa.webdatacommons.org/prov/144800620"
      "properties" : {
        "http://www.w3.org/ns/prov#wasDerivedFrom" : [ "http://webisa.webdatacommons.org/34588156" ] } },

    { "id" : "http://webisa.webdatacommons.org/prov/463395716"
      "properties" : {
        "http://www.w3.org/ns/prov#wasDerivedFrom" : [ "http://webisa.webdatacommons.org/34588156"] } } }
