{ "items" : [
    { "id" : "http://webisa.webdatacommons.org/43944583"
      "properties" : {
        "http://www.w3.org/1999/02/22-rdf-syntax-ns#type" : [ "http://www.w3.org/ns/prov#Entity" ] ,
        "http://www.w3.org/ns/prov#value" : [ "Next, as indicated in FIG. 11A and FIG. 11B, after the insulating film such as BPSG has been formed on the entire surface, the resultant film is planar-processed by the reflow process to thereby form the interlayer insulating film 117." ] ,
        "http://www.w3.org/ns/prov#wasQuotedFrom" : [ "google.com" ] } },

    { "id" : "http://webisa.webdatacommons.org/prov/166639541"
      "properties" : {
        "http://www.w3.org/ns/prov#wasDerivedFrom" : [ "http://webisa.webdatacommons.org/43944583"] } } }
