{ "items" : [
    { "id" : "http://webisa.webdatacommons.org/49658631"
      "properties" : {
        "http://www.w3.org/1999/02/22-rdf-syntax-ns#type" : [ "http://www.w3.org/ns/prov#Entity" ] ,
        "http://www.w3.org/ns/prov#value" : [ "Accordingly, the invention in one of its aspects is a method for uniformly heating a semiconductor substrate of nonuniform thermal mass having a temperature-sensitive film deposited thereon, which comprises immersing said semiconductor substrate in a heated liquid for a time and at a temperature sufficient to obtain a uniform temperature over said substrate, said heated liquid being chemically ine" ] ,
        "http://www.w3.org/ns/prov#wasQuotedFrom" : [ "google.com" ] } },

    { "id" : "http://webisa.webdatacommons.org/prov/396501558"
      "properties" : {
        "http://www.w3.org/ns/prov#wasDerivedFrom" : [ "http://webisa.webdatacommons.org/49658631"] } } }
