{ "items" : [
    { "id" : "http://webisa.webdatacommons.org/72158990"
      "properties" : {
        "http://www.w3.org/1999/02/22-rdf-syntax-ns#type" : [ "http://www.w3.org/ns/prov#Entity" ] ,
        "http://www.w3.org/ns/prov#value" : [ "The invention relates to a system and method for thermal processing of a workpiece, and more particularly relates to a system and method for regulating a processing temperature of the workpiece, and reducing an amount of process gas required to process the workpiece as well as the corresponding gas switching and purge time." ] ,
        "http://www.w3.org/ns/prov#wasQuotedFrom" : [ "google.com" ] } },

    { "id" : "http://webisa.webdatacommons.org/prov/388465225"
      "properties" : {
        "http://www.w3.org/ns/prov#wasDerivedFrom" : [ "http://webisa.webdatacommons.org/72158990"] } } }
