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PrefixNamespace IRI
n5google.com.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:103386150
rdf:type
prov:Entity
prov:value
Impurities such as oxygen and moisture adsorbed on the substrate, and impurities such as oxygen and moisture within films formed on the substrate can thus be removed.
prov:wasQuotedFrom
n5:au
Subject Item
isap:60847694
prov:wasDerivedFrom
isa:103386150
Subject Item
isap:105929485
prov:wasDerivedFrom
isa:103386150