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Examples of the alkaline-earth metal include Ca, Mg, Sr, and Ba. [0052] In the first to fourth manufacturing methods described above, it is preferable that a cycle of portions of a Group III nitride semiconductor layer are selected as seed crystals is at least 30 ??m, more preferably at least 50 ??m, further preferably at least 100 ??m, and particularly preferably at least 1000 ??m.
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