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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:202048257
rdf:type
prov:Entity
prov:value
Although deposition of carbon, simultaneous etching of carbon and SiO2, and removal of a damaged layer are performed by a Ga FIB, the ion is not limited to the Ga FIB. For example, it is apparent that the process of each of the above steps may be performed using another ion such as Au or Si.
prov:wasQuotedFrom
n5:fr
Subject Item
isap:187081385
prov:wasDerivedFrom
isa:202048257