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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:228177555
rdf:type
prov:Entity
prov:value
In the case of forming an interconnect structure, the insulating interlayer may include the known insulating material such as BPSG, PSG, BSG, AsSG, PbSG, SbSG, SOG, SiON or SiN, or the dielectric stack thereof, other than SiO2.
prov:wasQuotedFrom
n5:com
Subject Item
isap:457733978
prov:wasDerivedFrom
isa:228177555