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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:22949377
rdf:type
prov:Entity
prov:value
The process for fabricating a microelectromechanical device of claim 2 wherein said conductor is aluminum and said insulator is an oxide, and wherein said step of anisotropic etching includes the step of ion etching in an oxygen rich atmosphere.
prov:wasQuotedFrom
n5:com
Subject Item
isap:13660264
prov:wasDerivedFrom
isa:22949377