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Also, a cover 7 including a light transmitting material, such as glass or the like, is irradiated from above with a laser beam L1 from a laser beam irradiation device 9 so that the laser beam L1 is applied to a position corresponding to a brazing material 8 to thermally melt the brazing material 8 by the laser beam L1, thereby fixing the cover 7 to the upper end of each package 6 and sealing each
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