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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:319139427
rdf:type
prov:Entity
prov:value
Subsequently, the protective layer 1006 is removed, and a conductor such as aluminum is film-formed on the surfaces of the insulating layers 1002 and 1003 with the vapor deposition method, the sputtering method or the like and is patterned with the photolithography method.
prov:wasQuotedFrom
n5:com
Subject Item
isap:183448745
prov:wasDerivedFrom
isa:319139427
Subject Item
isap:345948368
prov:wasDerivedFrom
isa:319139427