This HTML5 document contains 5 embedded RDF statements represented using HTML+Microdata notation.

The embedded RDF content will be recognized by any processor of HTML5 Microdata.

PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:374507051
rdf:type
prov:Entity
prov:value
A pattern-like film layer of the order of 1 ??m is present on the wafer which is a substrate to be projected, and the pattern-like film layer includes a layer of optically transparent material such as SiO2 and a layer of optically opaque material such as Si or aluminum.
prov:wasQuotedFrom
n5:com
Subject Item
isap:293789346
prov:wasDerivedFrom
isa:374507051
Subject Item
isap:459109568
prov:wasDerivedFrom
isa:374507051