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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:399051954
rdf:type
prov:Entity
prov:value
A method of forming a structure of substantially uniform cross-sectional area on a substrate, comprising sequentially the steps of:a) forming a first layer of a material not normally soluble in a developing solution but becoming soluble therein upon exposure to actinic radiation, said material including an insolubilizing compound capable of diffusing into solubilized portions of said material to m
prov:wasQuotedFrom
n5:com
Subject Item
isap:57689129
prov:wasDerivedFrom
isa:399051954