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PrefixNamespace IRI
n5google.
isaphttp://webisa.webdatacommons.org/prov/
isahttp://webisa.webdatacommons.org/
rdfhttp://www.w3.org/1999/02/22-rdf-syntax-ns#
provhttp://www.w3.org/ns/prov#
xsdhhttp://www.w3.org/2001/XMLSchema#
Subject Item
isa:55368763
rdf:type
prov:Entity
prov:value
The vacuum annealing of FIG. 8D is performed using the same or similar method described previously with reference to FIG. 1C. Through vacuum annealing, impurities, such as carbon, which remain on the HfO2 dielectric layer 134, can be effectively removed, and the HfO2 dielectric layer 134 can become effectively densified.
prov:wasQuotedFrom
n5:es
Subject Item
isap:102216659
prov:wasDerivedFrom
isa:55368763