<http://webisa.webdatacommons.org/prov/431052966>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/103451394> .
<http://webisa.webdatacommons.org/103451394>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/103451394>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/103451394>	<http://www.w3.org/ns/prov#value>	"In a preferred embodiment, the chamber is a chamber in which a film is formed on a wafer, the first and second gases are a reactive gas and an inert gas, respectively, and means are provided for evacuating the chamber to the set pressure." .