<http://webisa.webdatacommons.org/109350828>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/109350828>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/109350828>	<http://www.w3.org/ns/prov#value>	"In this method and system, a series of steps including placing a substrate in a high-pressure vessel of a supercritical processing apparatus, etching it with a liquid of strong acid, rising it with deionized water, and replacing the deionized water with an alcohol are carried out." .
<http://webisa.webdatacommons.org/prov/137786699>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/109350828> .