<http://webisa.webdatacommons.org/prov/193195866>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/163438952> .
<http://webisa.webdatacommons.org/163438952>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/163438952>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<freepatentsonline.com> .
<http://webisa.webdatacommons.org/163438952>	<http://www.w3.org/ns/prov#value>	"In particular, one of the significant advantages of the present invention is that overlay layer 20 (and its associated metallization patterns) may be removed." .