<http://webisa.webdatacommons.org/174954909>	<http://www.w3.org/ns/prov#value>	"a feature formed on a semiconductor wafer, the feature including a volume" .
<http://webisa.webdatacommons.org/prov/441585565>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/174954909> .
<http://webisa.webdatacommons.org/174954909>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/174954909>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<faqs.org> .