<http://webisa.webdatacommons.org/183557905>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/433365747>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/183557905> .
<http://webisa.webdatacommons.org/183557905>	<http://www.w3.org/ns/prov#value>	"However, there is a problem in that the inner wall surface of the processing container may be sputtered so as to be damaged." .
<http://webisa.webdatacommons.org/183557905>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .