<http://webisa.webdatacommons.org/196313663>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/196313663>	<http://www.w3.org/ns/prov#value>	"In the micro inspecting stage, a defect of for example 0.1 ??m or larger can be detected." .
<http://webisa.webdatacommons.org/196313663>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/131685744>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/196313663> .