<http://webisa.webdatacommons.org/prov/187544813>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/199542762> .
<http://webisa.webdatacommons.org/199542762>	<http://www.w3.org/ns/prov#value>	"polycrystalline silicon layer 63 are set, for example as 100 nm and" .
<http://webisa.webdatacommons.org/199542762>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/199542762>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patents.com> .