<http://webisa.webdatacommons.org/202567404>	<http://www.w3.org/ns/prov#value>	"Preferably, the substrate material is silicon, gallium arsenide, sapphire or other suitable material with like thermal expansion coefficients." .
<http://webisa.webdatacommons.org/prov/60235804>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/202567404> .
<http://webisa.webdatacommons.org/prov/62365816>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/202567404> .
<http://webisa.webdatacommons.org/202567404>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/202567404>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .