<http://webisa.webdatacommons.org/prov/281611085>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/213347679> .
<http://webisa.webdatacommons.org/213347679>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/213347679>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/213347679>	<http://www.w3.org/ns/prov#value>	"Since the cleaning gas can be made by mixing various kinds of gases, the cleaning gas supply section 28 includes a plurality of cleaning gas supply parts 28 a and 28 b corresponding to the kinds of the gases." .