<http://webisa.webdatacommons.org/22171724>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.com> .
<http://webisa.webdatacommons.org/22171724>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/375100953>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/22171724> .
<http://webisa.webdatacommons.org/22171724>	<http://www.w3.org/ns/prov#value>	"The laser may be an excimer laser, especially an ArF excimer laser." .