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<http://webisa.webdatacommons.org/225093874>	<http://www.w3.org/ns/prov#value>	"The unilluminated parts are removed by the etchant used in thewet-etching process at the rate normal to the particular material, etchant composition, temperature and other relevant factors." .
<http://webisa.webdatacommons.org/prov/144679679>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/225093874> .
<http://webisa.webdatacommons.org/225093874>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<patentgenius.com> .