<http://webisa.webdatacommons.org/225561592>	<http://www.w3.org/ns/prov#wasQuotedFrom>	<google.es> .
<http://webisa.webdatacommons.org/225561592>	<http://www.w3.org/ns/prov#value>	"Thus, there is a need for an improved apparatus and method of generating a plasma in deposition processes." .
<http://webisa.webdatacommons.org/225561592>	<http://www.w3.org/1999/02/22-rdf-syntax-ns#type>	<http://www.w3.org/ns/prov#Entity> .
<http://webisa.webdatacommons.org/prov/165919453>	<http://www.w3.org/ns/prov#wasDerivedFrom>	<http://webisa.webdatacommons.org/225561592> .